The furnace body is designed as an open type for easy replacement of furnace tubes

● Working power supply: 208-240 VAC, 50/60Hz

The maximum power is 2KW

Maximum operating temperature: 1200 ℃ (<1h)

Continuous operating temperature: 1100 ℃

Heating zone length: 200mm

Length of constant temperature zone: 60mm (+/-1 ℃ @ 1000 ℃)Note: Due to the influence of measurement methods and external environment, the measurement results may have deviations. This parameter is for reference only and should not be used as a technical indicator of the equipment. You need accurate constant temperature zone data to purchase the product. Please contact our sales personnel

● Furnace tube: high-purity quartz tube, size 50mm O.D x 44mm I.D x 450mm L)(Click on the image to view detailed information)

● Adopting PID 30 segment programmed temperature control, with a temperature control accuracy of+/-1 ℃

● Temperature control instrument operation video

● Equipped with overheating and disconnection protection

The thermocouple adopts K-type thermocouple

Using KF structure sealing flange and silicone sealing ring for sealing

There is a mechanical pressure gauge installed on the flange

The right flange is connected to a vacuum stainless steel corrugated pipe (the maximum expansion and contraction range of the stainless steel corrugated pipe is 150mm)

Vacuum degree: 10-2Torr (using mechanical pump) 10-5Torr (using molecular pump)

A 1/4 "diameter Omega armored thermocouple (K-type) is inserted into the furnace tube through a flange and can move with the crucible to monitor the actual temperature of the sample in real time

● Use a stepper motor to move the crucible (sample stage) inside the furnace tube, with a maximum stroke of 100mm and a movement accuracy of 1mm

● Set a certain distance and target position for the crucible through the touch screen, with a crucible movement speed of 180mm/min (more accurate movement speed can be customized by contacting our company, additional charges apply)

You can observe the following diagram to understand the installation method of crucible and thermocouple

● Optional manual baffle valve (Figure 1)

Anti corrosion digital vacuum gauge (Figure 4)

● Quickly connect the flange for easy placement of samples (Figure 2)

A mixed gas system controlled by multiple mass flow meters, used for CVD and DVD experiments (Figure 5)

●The pressure inside the furnace tube cannot exceed 0.02MPa

●Due to the high internal pressure of the gas cylinder, a pressure reducing valve must be installed on the cylinder when introducing gas into the furnace tube. It is recommended to purchase a pressure reducing valve from our company, which has a range of 0.01MPa-0.1MPa and can be used more accurately and safely

●When the temperature of the furnace body is higher than 1000 ℃, the furnace tube cannot be in a vacuum state. The pressure inside the furnace tube should be equivalent to atmospheric pressure and maintained at atmospheric pressure

●The gas flow rate entering the furnace tube should be less than 200SCCM to avoid the impact of cold large airflow on the heated quartz tube

●The long-term use temperature of quartz tube is less than 1100 ℃

●For the experiment of sample heating, it is not recommended to close the exhaust valve and inlet valve at the flange end of the furnace tube. If it is necessary to close the gas valve to heat the sample, it is necessary to constantly pay attention to the reading on the pressure gauge. If the pressure reading is greater than 0.02 MPa, the vent valve must be opened immediately to prevent accidents (such as furnace tube rupture, flange flying out, etc.)

●This device can be used for various experiments, and several experimental methods are listed below

●RTE (rapid thermal evaporation): The evaporated material is placed in a crucible, placed in the center of the furnace, the substrate is placed on the sample stage, the sample stage is connected to the thermocouple, and then the sample stage is moved to the ideal position (where the temperature is the temperature required for the experiment)

●HPCVD (Hybrid Physical Chemical Deposition): Similar to RTE, but requires a mixed gas system to mix the reaction gases and control the flow rate, while also setting the position of the evaporation material (determining the evaporation temperature of the evaporation material)

●Horizontal Bridgman method for crystal growth: Place the sample and seed crystal into a crucible, and place the crucible at the center of the furnace. Then, set the crucible movement speed and slowly move the crucible